Characteristics of Hall accelerator for helium-ion beam extraction
- Author
- OKADA, M1 ; TOKU, H; YAMAMOTO, Y; YOSHIKAWA, K
[1] Nippon Steel Corp., Advanced Materials & Technology Research Laboratories, Nakahara-ku, Kawasaki 211, Japan - Source
Japanese journal of applied physics. 1993, Vol 32, Num 10, pp 4826-4837 ; 1 ; ref : 22 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Accélérateur Couche mince Dépôt Etude expérimentale Etude théorique Extraction faisceau Hélium ion Revêtement Source ion
- Keyword (en)
- Accelerators Thin films Deposition Experimental study Theoretical study Beam extraction Helium ions Coatings Ion sources
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B20 Nuclear physics / 001B20I Experimental methods and instrumentation for elementary-particle and nuclear physics / 001B20I25 Particle sources and targets / 001B20I25N Ion sources: positive and negative
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Discipline
- Nuclear physics Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3878723
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.32.4826 
https://dx.doi.org/10.1143/JJAP.32.4826
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