Surface reaction kinetics of gas-phase diamond growth
- Author
- KONDOH, E; OHTA, T; MITOMO, T; OHTSUKA, K
Kawasaki Steel Corp., LSI res. cent., tech. res. div., Chuo-ku, Chiba 260, Japan - Source
Journal of applied physics. 1993, Vol 73, Num 6, pp 3041-3046 ; ref : 17 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- CVD Cinétique Constante vitesse Croissance cristalline Diamant Dépendance température Energie activation Equation Arrhenius Etude expérimentale Fil chaud Mécanisme réaction Réaction surface C Non métal
- Keyword (en)
- CVD Kinetics Rate constant Crystal growth Diamonds Temperature dependence Activation energy Arrhenius equation Experimental study Hot wire Reaction mechanism Surface reactions Nonmetals
- Keyword (es)
- Constante velocidad Hilo caliente Mecanismo reacción
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35M Surface energy; thermodynamic properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C03 Organic chemistry / 001C03B Reactivity and mechanisms / 001C03B02 Kinetics and mechanisms
- Discipline
- Organic chemistry Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 3892655
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.353011 
https://dx.doi.org/10.1063/1.353011
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