Properties and special features of crystallization of epitaxial GaAs films grown on Si(100) substrates by the method of two-stage deposition using the MOCVD hydride process
- Author
- VINOKUROV, D. A; LANTRATOV, V. M; SINITSYN, M. A; ULIN, V. P; FALEEV, N. N; FEDOROVA, O. M; SHAIOVICH, Y. L; YAVICH, B. S
Acad. sci. USSR, A. F. Ioffe physicotech. inst., Leningrad, Ussr - Source
Soviet physics. Semiconductors. 1991, Vol 25, Num 6, pp 617-621 ; ref : 15 ref
- ISSN
- 0038-5700
- Scientific domain
- Electronics; Condensed state physics
- Publisher
- American Institute of Physics, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Composé organométallique Couche mince Croissance cristalline Diagramme rotation Diffraction RX Dépôt chimique phase vapeur Epitaxie Etude expérimentale Gallium Arséniure Hétéroépitaxie Microscopie électronique transmission Mode opératoire Monocristal Photoluminescence Semiconducteur Support Support Si
- Keyword (en)
- Inorganic compound Organometallic compound Thin film Crystal growth Rocking curve X ray diffraction Chemical vapor deposition Epitaxy Experimental study Gallium Arsenides Heteroepitaxy Transmission electron microscopy Operating mode Single crystal Photoluminescence Semiconductor materials Support
- Keyword (es)
- Compuesto inorgánico Compuesto organometálico Capa fina Crecimiento cristalino Diagrama rotación Difracción RX Depósito químico fase vapor Epitaxia Estudio experimental Galio Arseniuro Heteroepitaxia Microscopía electrónica transmisión Método operatorio Monocristal Fotoluminiscencia Semiconductor(material) Soporte
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5158775
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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