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Oval defects in submicron GaAs and AIGaAs films grown by molecular beam epitaxy

Author
BUYANOV, A. V; LAURS, E. P; PEKA, G. P; SEMASHKO, E. M; TKACHENKO, V. N
Kiev radio works production enterprise, Kiev, Ussr
Source

Soviet physics. Solid state. 1991, Vol 33, Num 9, pp 1551-1553 ; ref : 4 ref

ISSN
0038-5654
Scientific domain
Condensed state physics
Publisher
American Institute of Physics, New York, NY
Publication country
United States
Document type
Article
Language
English
Keyword (fr)
Aluminium Gallium Arséniure Mixte Cathodoluminescence Condensation faisceau moléculaire Couche mince Défaut cristallin Emission RX Epitaxie Etude expérimentale Gallium Arséniure Microscopie électronique balayage Mécanisme croissance Méthode phase vapeur Semiconducteur Silicium
Keyword (en)
Aluminium Gallium Arsenides Mixed Cathodoluminescence Molecular beam condensation Thin film Crystal defect X ray emission Epitaxy Experimental study Gallium Arsenides Scanning electron microscopy Growth mechanism Growth from vapor Semiconductor materials Silicon
Keyword (es)
Aluminio Galio Arseniuro Mixto Catodoluminiscencia Condensación haz molecular Capa fina Defecto cristalino Emisión RX Epitaxia Estudio experimental Galio Arseniuro Microscopía electrónica barrido Mecanismo crecimiento Método fase vapor Semiconductor(material) Silicio
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35J Surface and interface dynamics and vibrations

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
5284184

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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