Phase transformation of titanium silicide as measured by ellipsometry
- Author
- SIKORA, R; LUNDY, W
Microchip Technology Inc., Chandler AZ 85224-6199, United States - Source
Journal of applied physics. 1992, Vol 72, Num 3, pp 1160-1163 ; ref : 12 ref
- CODEN
- JAPIAU
- ISSN
- 0021-8979
- Scientific domain
- Crystallography; Electronics; Optics; Condensed state physics; Physics
- Publisher
- American Institute of Physics, Woodbury, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Conductivité électrique Ellipsométrie Etude comparative Etude expérimentale Fonction diélectrique Microstructure Modèle milieu effectif Métal transition Composé Phase métastable Recuit thermique Titane Siliciure Transformation phase Résistance couche
- Keyword (en)
- Inorganic compound Electrical conductivity Ellipsometry Comparative study Experimental study Dielectric function Microstructure Effective medium model Transition metal Compounds Metastable phase Thermal annealing Titanium Silicides Phase transformation Sheet resistance
- Keyword (es)
- Compuesto inorgánico Conductividad eléctrica Elipsometría Estudio comparativo Estudio experimental Función dieléctrica Microestructura Modelo medio efectivo Metal transición Compuesto Fase metastable Recocido térmico Titanio Siliciuro Transformación fase
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60D Equations of state, phase equilibria, and phase transitions / 001B60D70 Specific phase transitions
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 5442731
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1063/1.351794 
https://dx.doi.org/10.1063/1.351794
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