Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry
- Author
- VEDAM, K1 ; KIM, S. Y
[1] Pennsylvania state univ., materials res. lab., University Park PA 16802, United States - Source
Applied optics. 1989, Vol 28, Num 14, pp 2691-2694 ; ref : 14 ref
- CODEN
- APOPAI
- ISSN
- 0003-6935
- Scientific domain
- Electronics; Optics; Telecommunications
- Publisher
- Optical Society of America, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Composé minéral Couche mince Ellipsométrie spectroscopique Etude expérimentale Indice réfraction Magnésium Oxyde Support SiO2
- Keyword (en)
- Inorganic compound Thin film Spectroscopic ellipsometry Experimental study Refraction index Magnesium Oxides
- Keyword (es)
- Compuesto inorgánico Capa fina Elipsometría espectroscópica Estudio experimental Indice refracción Magnesio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 7356590
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1364/AO.28.002691 
https://dx.doi.org/10.1364/AO.28.002691
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