DETERMINATION OF THE RELATIVE NITROGEN DOPING LEVEL OF TANTALUM NITRIDE RESISTOR FILM BY MEANS OF THE SEEBECK EFFECT
- Author
- TRUDEL ML
BELL TELEPHONE LAB. INC., ALLENTOWN, PA - Source
- I.E.E.E. TRANS. PARTS HYBR. PACKAG.; U.S.A.; DA. 1972; VOL. 8; NO 3; PP. 16-21; BIBL. 4 REF.
- Document type
- Serial Issue
- Language
- English
- Keyword (fr)
- DEPOT PULVERISATION CATHODIQUE PULVERISATION REACTIVE RESISTANCE ELECTRIQUE RESISTANCE COUCHE MINCE NITRURE TANTALE CIRCUIT INTEGRE COUCHE MINCE AZOTE DOPAGE AZOTE NIVEAU DOPAGE EFFET SEEBECK COUCHE MINCE PREPARATION COUCHE MINCE APPAREILLAGE ESSAI CONTROLE MATERIAU CARACTERISTIQUE APPLICATION ELECTROMAGNETISME ELECTRONIQUE
- Keyword (en)
- ELECTROMAGNETISM ELECTRONICS
- Keyword (es)
- ELECTROMAGNETISMO ELECTRONICA
- Classification
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7314505350
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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