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THE INVESTIGATION OF ION IMPLANTED LAYERS BY SCANNING ELECTRON MICROSCOPY.

Author
ROTHEMUND W; FRITZSCHE CR
INST. ANGEW. FESTKOERPERPHYS., D-7800 FREIBURG, FED. REPUBL. GER.
Source
APPL. PHYS.; GERM.; DA. 1976; VOL. 10; NO 2; PP. 111-119; BIBL. 8 REF.
Document type
Article
Language
English
Keyword (fr)
SILICIUM GALLIUM COMPOSE ARSENIURE IMPLANTATION IMPURETE ANALYSE ME BALAYAGE DIAGRAMME CANALISATION ANALYSE DIFFUSION ELECTRON AMORPHISATION GALLIUM ARSENIURE METALLOIDE COMPOSE MINERAL CRISTALLOGRAPHIE
Keyword (en)
SILICON GALLIUM COMPOUND ARSENIDES CHANNELING DIAGRAM AMORPHIZATION INORGANIC COMPOUND CRISTALLOGRAPHY
Keyword (es)
CRISTALOGRAFIA
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography

Discipline
Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL7740005956

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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