A DIFFUSED SILICON PRESSURE TRANSDUCER WITH STRESS CONCENTRATED AT TRANSVERSE GAGES.
- Author
- WILNER LB
BECTON-DICKINSON ELECTRON. LAB., MOUNTAIN VIEW, CALIF. - Source
- I.S.A. TRANS.; USA; DA. 1978; VOL. 17; NO 1; PP. 83-87; BIBL. 6 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- MANOMETRIE CAPTEUR PRESSION EXTENSOMETRE SILICIUM FABRICATION GRAVURE ANISOTROPIE PHYSIQUE THEORIQUE METROLOGIE
- Keyword (en)
- MANOMETRY PRESSURE SENSOR EXTENSOMETERS SILICON ANISOTROPY THEORETICAL PHYSICS MEASUREMENT SCIENCE
- Keyword (es)
- FISICA TEORICA METROLOGIA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7930060572
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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