A DIGITAL ELLIPSOMETER
- Author
- ABE M; MIZUNO M
TOKYO INST. TECHNOL., MEGURO-KU TOKYO, JPN - Source
- JAP. J. APPL. PHYS.; JPN; DA. 1979; VOL. 18; NO 1; PP. 165-167; BIBL. 6 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- ELLIPSOMETRIE ELLIPSOMETRE APPAREIL NUMERIQUE PHYSIQUE THEORIQUE METROLOGIE
- Keyword (en)
- ELLIPSOMETRY ELLIPSOMETER DIGITAL INSTRUMENT THEORETICAL PHYSICS MEASUREMENT SCIENCE
- Keyword (es)
- FISICA TEORICA METROLOGIA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7930461457
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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Istex access
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Europe PubMed Central access
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