DETERMINATION OF THE PHOSPHORUS CONTENT OF DOPED SIO2 FILMS BY IR ABSORPTION AND ACTIVATION ANALYSIS
- Author
- HOFFMANN G; PUSKAS L; LORINC M; NAGY A
HUNGARIAN ACAD. SCI. RES. INST. TECH. PHYS., BUDAPEST, HUN - Source
- J. PHYS. D; GBR; DA. 1979; VOL. 12; NO 4; PP. 569-577; BIBL. 15 REF.
- Document type
- Article
- Language
- English
- Keyword (fr)
- DOSAGE ANALYSE ACTIVATION SPECTROMETRIE ABSORPTION SPECTROMETRIE IR COUCHE MINCE DOPAGE SEMICONDUCTEUR METHODE PHYSIQUE PHOSPHORE!ACT SILICE!SUB CHIMIE ANALYTIQUE
- Keyword (en)
- ANALYTICAL DETERMINATION ACTIVATION ANALYSIS ABSORPTION SPECTROMETRY ABSORPTION SPECTROSCOPY INFRARED SPECTROMETRY INFRARED SPECTROSCOPY THIN FILM DOPING SEMICONDUCTOR MATERIALS PHYSICAL METHOD ANALYTICAL CHEMISTRY
- Keyword (es)
- QUIMICA ANALYTICA
- Classification
- Discipline
- General chemistry and physical chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL7960411053
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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