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A DIAGNOSTIC PATTERN FOR GAAS FET MATERIAL DEVELOPMENT AND PROCESS MONITORING

Author
IMMORLICA AA JR; DECKER DR; HILL WA
ROCKWELL INTERNATIONAL ELECTRON. RES. CENT./THOUSAND OAKS CA 91360/USA
Source
IEEE TRANS. ELECTRON DEVICES; ISSN 0018-9383; USA; DA. 1980; VOL. 27; NO 12; PP. 2285-2291; BIBL. 19 REF.
Document type
Article
Language
English
Keyword (fr)
TRAITEMENT MATERIAU ESSAI CONTROLE PROCESSUS TRANSISTOR EFFET CHAMP IMPLANTATION ION TRANSISTOR PUISSANCE GALLIUM ARSENIURE ELECTRONIQUE
Keyword (en)
MATERIAL PROCESSING TEST FIELD EFFECT TRANSISTOR ION IMPLANTATION POWER TRANSISTOR ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL8130224453

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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