APPLICATION OF DIFFERENTIAL INTERFERENCE CONTRAST AND INTERFEROMETRY TO THE STUDY OF PHOTORESIST COATINGS
- Author
- MANTLE H
LAB. SUISSE RECH. HORLOGERES/NEUCHATEL 2000/CHE - Source
- BULL. ANNU. SOC. SUISSE CHRONOM. LAB. SUISSE RECH. HORLOG.; ISSN 0366-3124; CHE; DA. 1981; VOL. 10; PP. 147-156; BIBL. 10 REF.
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- PHOTORESIST EPAISSEUR COUCHE MINCE MICROSCOPIE OPTIQUE INTERFEROMETRIE OPTIQUE CIRCUIT INTEGRE PHOTOLITHOGRAPHIE DIMENSION MESURE METROLOGIE PHYSIQUE THEORIQUE
- Keyword (en)
- THICKNESS THIN FILM OPTICAL MICROSCOPY OPTICAL INTERFEROMETRY INTEGRATED CIRCUIT DIMENSIONS MEASUREMENT MEASUREMENT SCIENCE THEORETICAL PHYSICS
- Keyword (es)
- METROLOGIA FISICA TEORICA
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics
- Discipline
- Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- PASCAL82X0031324
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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