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CONTACT RESISTANCE BEHAVIOR OF THE PD2 SI-AL CU SI SYSTEM

Author
SUGERMAN A; TSAI HJ; KRISTOFF JS; REGH J
IBM, GEN. TECHNOLOGY DIV./HOPEWELL JUNCTION NY 12533/USA
Source
JOURNAL OF ELECTRONIC MATERIALS; ISSN 0361-5235; USA; DA. 1982; VOL. 11; NO 5; PP. 943-955; BIBL. 4 REF.
Document type
Article
Language
English
Keyword (fr)
CONTACT ELECTRIQUE PALLADIUM SILICIURE ALUMINIUM CUIVRE SILICIURE RESISTANCE CONTACT ELECTRONIQUE
Keyword (en)
ELECTRIC CONTACT PALLADIUM SILICIDES ALUMINIUM COPPER SILICIDES CONTACT RESISTANCE ELECTRONICS
Keyword (es)
ELECTRONICA
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
PASCAL83X0211474

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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