au.\*:("CARLSON, Steven P")
Results 1 to 1 of 1
Selection :
Experimental measurements of the strain energy release rate for stiction-failed microcantilevers using a single-cantilever beam peel testLESEMAN, Zayd C; CARLSON, Steven P; MACKIN, Thomas J et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 1, pp 38-43, issn 1057-7157, 6 p.Article
