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Results 1 to 25 of 9268

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Three-dimensional interconnect technology on a flexible polyimide filmHAN, Ji-Song; TAN, Zhi-Yong; SATO, K et al.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 1, pp 38-48, issn 0960-1317, 11 p.Article

Exploring tradeoffs in pleiotropy and redundancy using evolutionary computingBERRYMAN, Matthew J; KHOO, Wei-Li; NGUYEN, Hiep et al.SPIE proceedings series. 2004, pp 49-58, isbn 0-8194-5168-1, 10 p.Conference Paper

Field effect sensors for PCR applicationsTAING, M; SWEATMAN, D.SPIE proceedings series. 2004, pp 364-373, isbn 0-8194-5168-1, 10 p.Conference Paper

Effects of nonlinear elaborations on the performance of a Reichardt correlatorRAJESH, Sreeja; O'CARROLL, David; ABBOTT, Derek et al.SPIE proceedings series. 2004, pp 287-303, isbn 0-8194-5168-1, 17 p.Conference Paper

A new approach to microfabrication and synthesization using synchrotron radiation excited chemical reactionUTSUMI, Y; HATTORI, T.Microsystem technologies. 2003, Vol 9, Num 5, pp 316-318, issn 0946-7076, 3 p.Article

Mechanical behavior of aluminum foils as micro structural material under low velocity impact loadingAUZANNEAU, T; SATO, C.Microsystem technologies. 2003, Vol 9, Num 3, pp 183-187, issn 0946-7076, 5 p.Article

Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bendingZHIXIONG XIAO; WUYONG PENG; FARMER, K. R et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 929-936, issn 1057-7157, 8 p.Article

Selected Papers from the 13th European Micromechanics Workshop (MME'02)Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, issn 0960-1317, 196 p.Conference Proceedings

PbZrxTi1-xO3 thin films for piezoelectric MEMSMURALT, P; BABOROWSKI, J; LEDERMANN, N et al.Piezoelectric materials for macro/micro systems 2003. 2003, pp 97-128, isbn 81-271-0020-X, 32 p.Book Chapter

IR uncooled bolometers based on amorphous GexSi1-xOy on silicon micromachined structuresIBORRA, Enrique; CLEMENT, Marta; HERRERO, Lucia Vergara et al.Journal of microelectromechanical systems. 2002, Vol 11, Num 4, pp 322-329, issn 1057-7157Article

Detection of misfire and knock in spark ignition engines by wavelet transform of engine block vibration signalsCHANG, Jinseok; KIM, Manshik; MIN, Kyoungdoug et al.Measurement science & technology (Print). 2002, Vol 13, Num 7, pp 1108-1114, issn 0957-0233, 7 p.Article

Microfabrication of high-aspect ratio and complex monolithic structures in glassBELLOY, Eric; PAWLOWSKI, Anne-Gabrielle; SAYAH, Abdeljalil et al.Journal of microelectromechanical systems. 2002, Vol 11, Num 5, pp 521-527, issn 1057-7157, 7 p.Article

Microscopic surface contouring by fringe projection methodQUAN, C; TAY, C. J; HE, X. Y et al.Optics and laser technology. 2002, Vol 34, Num 7, pp 547-552, issn 0030-3992, 6 p.Article

Quantum gears: a simple mechanical system in the quantum regimeMACKINNON, Angus.Nanotechnology (Bristol. Print). 2002, Vol 13, Num 5, pp 678-681, issn 0957-4484, 4 p.Article

Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerizationMARUO, Shoji; IKUTA, Koji.Sensors and actuators. A, Physical. 2002, Vol 100, Num 1, pp 70-76, issn 0924-4247, 7 p.Article

Transducers'01 Eurosensors XV, Munich, Germany, 10-14 June 2001FRENCH, P.Sensors and actuators. A, Physical. 2002, Vol 97-98, issn 0924-4247, 789 p.Conference Proceedings

A magnetic design for a slim type DVD actuatorKE, Chau-Yuan; CHANG, Chi-Lone; JU, Jau-Jiu et al.Journal of magnetism and magnetic materials. 2002, Vol 239, Num 1-3, pp 604-606, issn 0304-8853Conference Paper

Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymersEBERHARDT, W; GERHÄUSSER, Th; GIOUSOUF, M et al.Sensors and actuators. A, Physical. 2002, Vol 97-98, pp 473-477, issn 0924-4247, 5 p.Conference Paper

Process characterization of fabricating 3D micro channel systems by laser-micromachiningQIN, S. J; LI, Wen J.Sensors and actuators. A, Physical. 2002, Vol 97-98, pp 749-757, issn 0924-4247, 9 p.Conference Paper

Bubble-based micropump for electrically conducting liquidsGENG, X; YUAN, H; OGUZ, H. N et al.Journal of micromechanics and microengineering (Print). 2001, Vol 11, Num 3, pp 270-276, issn 0960-1317Article

Laser bending of etched silicon microstructuresGÄRTNER, E; FRÜHAUF, J; LÖSCHNER, U et al.Microsystem technologies. 2001, Vol 7, Num 1, pp 23-26, issn 0946-7076Article

Silicon carbide micro-reaction-sintering using micromachined silicon moldsTANAKA, Shuji; SUGIMOTO, Shinya; LI, Jing-Feng et al.Journal of microelectromechanical systems. 2001, Vol 10, Num 1, pp 55-61, issn 1057-7157Article

Operation cycle modeling for electrostatic-type micro-relayEFREMOV, G. I; MUKHUROV, N. I.SPIE proceedings series. 2001, pp 322-326, isbn 0-8194-4108-2Conference Paper

Fabrication and test of thermal vertical bimorph actuators for movement in the wafer planeSEHR, Harald; EVANS, Alan G. R; BRUNNSCHWEILER, Arthur et al.Journal of micromechanics and microengineering (Print). 2001, Vol 11, Num 4, pp 306-310, issn 0960-1317Article

Fabrication of silicon and oxide membranes over cavities using ion-cut layer transferYUN, Chang-Han; CHEUNG, Nathan W.Journal of microelectromechanical systems. 2000, Vol 9, Num 4, pp 474-477, issn 1057-7157Article

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