Colloquium on Micro-ProductionKRAFT, Oliver; MICHEL, Bernd.Microsystem technologies. 2008, Vol 14, Num 12, issn 0946-7076, 230 p.Conference Proceedings

Control issues for microelectromechanical systemsBOROVIC, B; LEWIS, F. L; MCCULLEY, W et al.IEEE control systems. 2006, Vol 26, Num 2, pp 18-21, issn 1066-033X, 4 p.Article

MEMS microdisplays : overview and marketsBOUCHAUD, Jérémie; NOWAK, Olivier.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 618605.1-618605.9, issn 0277-786X, isbn 0-8194-6242-X, 1VolConference Paper

Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2011COURTOIS, Bernard; MICHEL, Bernd.Microsystem technologies. 2012, Vol 18, Num 11, issn 0946-7076, 185 p.Serial Issue

Fiber alignment analysis of a receiver with integrated MEMS VOACHAO WANG; HICKEY, Ryan; IRWIN, Rob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63521Q.1-63521Q.8, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

MEMS / MOEMS technologies and applications II (Beijing, 10-12 November 2004)Zhichun Ma; Guofan Jin; Xuyuan Chen et al.SPIE proceedings series. 2004, isbn 0-8194-5596-2, XI, 364 p, isbn 0-8194-5596-2Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2003 (DTIP 2003)Bergman, Keren.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, isbn 0-7803-7066-X, 1Vol, XI-411 p, isbn 0-7803-7066-XConference Proceedings

BioMEMS and smart nanostructures (Adelaide, 17-19 December 2001)Kish, Laszlo B; Harvey, Erol C; Spillman, William B et al.SPIE proceedings series. 2001, isbn 0-8194-4320-4, XI, 362 p, isbn 0-8194-4320-4Conference Proceedings

MEMS microdisplays : overview and marketsBOUCHIUD, Jérémie; WICHT, Henning.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 611406.1-611406.8, issn 0277-786X, isbn 0-8194-6156-3, 1VolConference Paper

MEMS components and applications for industry, automobiles, aerospace and communication II (San Jose CA, 28-29 January 2003)Janson, Siegfried W.SPIE proceedings series. 2003, isbn 0-8194-4781-1, XLIV, 248 p, isbn 0-8194-4781-1Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2004 (DTIP 2004)Courtois, Bernard.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, isbn 2-84813-026-1, 1 vol (XV-490 p.), isbn 2-84813-026-1Conference Proceedings

Ambient vibration study of the Gi-Lu cable-stay bridge : Application of wireless sensing unitsLU, Kung-Chun; YANG WANG; LYNCH, J. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61741D.1-61741D.11, issn 0277-786X, isbn 0-8194-6227-6Conference Paper

Analytical and experimental characterization of an optical MEMS devicePRYPUTNIEWICZ, Ryszard J; FURLONG, Cosme; PRYPUTNIEWICZ, Emily J et al.SPIE proceedings series. 2003, pp 774-779, isbn 0-8194-5189-4, 6 p.Conference Paper

Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2012COURTOIS, Bernard.Microsystem technologies. 2013, Vol 19, Num 6, issn 0946-7076, 184 p.Conference Proceedings

Research on micro/nano film getters for vacuum maintenance of MEMSYUFENG JIN; YING ZHAO.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 60320B.1-60320B.5, issn 0277-786X, isbn 0-8194-6063-XConference Paper

Development of MEMS based safe electro-thermal pyrotechnic igniter for a new generation of microfuzePENNARUN, Pierre; ROSSI, Carole; ESTEVE, Daniel et al.SPIE proceedings series. 2005, pp 558-569, isbn 0-8194-5831-7, 1Vol, 12 p.Conference Paper

Development of biosensor based on micro-diaphragmLI, Sui-Qiong; LI, Zhi-Min; CHIN, Bryan B et al.SPIE proceedings series. 2004, pp 306-313, isbn 0-8194-5306-4, 8 p.Conference Paper

Proceedings of the 2004 international symposium on micro-nano mechatronics and human science (Texte imprimé)International symposium on micro-nano mechatronics and human science. 2004, isbn 0-7803-8607-8, 1Vol, XI-380 p, isbn 0-7803-8607-8Conference Proceedings

Barriers to the commercialization issues of nanotechnology : Lessons learned from its big brother (a.k.a. MEMS/MST)GRACE, Roger H.European micro and nano systems. Conference. 2004, pp 243-247, isbn 2-916187-02-2, 1Vol, 5 p.Conference Paper

The robust design for micro electro-thermal actuatorsHEO, Seok; GIL HO YOON; YOON YOUNG KIM et al.SPIE proceedings series. 2004, pp 241-247, isbn 0-8194-5306-4, 7 p.Conference Paper

A novel single-layer bi-directional out-of-plane electrothermal microactuatorCHEN, Wen-Chih; HSIEH, Jerwei; WEILEUN FANG et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 693-697, issn 1084-6999, isbn 0-7803-7185-2, 5 p.Conference Paper

Compact copper/epoxy-based electromagnetic scanner for scanning probe applicationsROTHUIZEN, H; DESPONT, M; DRECHSLER, U et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 582-585, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

A large stepwise motion electrostatic actuator for a wireless microrobotBASSET, P; KAISER, A; BIGOTTE, P et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 606-609, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

High speed, large motion electrostatic artificial eyelidGOODWIN-JOHANSSON, Scott; DAVIDSON, Mark; DAUSCH, David et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 610-613, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustmentGALAYKO, Dimitri; KAISER, Andreas; LEGRAND, Bernard et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 665-668, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper