Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layersGERMER, T. A.SPIE proceedings series. 1998, pp 121-131, isbn 0-8194-2714-4Conference Paper

Thickness and roughness measurements in poly(o-methoxyaniline) layer-by-layer films using AFMRAPOSO, M; LOBO, R. F. M; PEREIRA-DA-SILVA, M. A et al.International symposium on electrets. 1999, pp 533-536, isbn 0-7803-5025-1Conference Paper

Measurement on roughness of optical surface by focal plane CCD cameraJIANBAI LI; XIAOYUN LI; AIHAN YING et al.SPIE proceedings series. 1998, pp 84-87, isbn 0-8194-2714-4Conference Paper

Examination of several novel approaches for the measurement of two-dimensional roughness of sidewalls of high aspect ratio patterns using the Atomic Force MicroscopeKINGSLEY, J. R; PLANO, R. J; GORDON CHAO, K.-J et al.SPIE proceedings series. 1998, pp 508-517, isbn 0-8194-2777-2Conference Paper

Oberflächenmesstechnik für Labor und Produktion = Surface measurement for laboratory and productionFRIES, T.VDI-Berichte. 2003, pp 217-225, issn 0083-5560, isbn 3-18-091806-3, 9 p.Conference Paper

Scattering from normal incidence EUV opticsGULLIKSON, E. M.SPIE proceedings series. 1998, pp 72-80, isbn 0-8194-2776-4Conference Paper

On the calibration of a stylus-type surface roughness measuring instrument interfaced to a personal computerZAHWI, S. Z; MEKAWI, A. M.Measurement science & technology (Print). 1998, Vol 9, Num 10, pp 1781-1784, issn 0957-0233Article

Metrology methods for the quantification of edge-roughnessNELSON, C. M; PALMATEER, S. C; LYSZCZARZ, T et al.SPIE proceedings series. 1998, pp 19-29, isbn 0-8194-2777-2Conference Paper

Rebonds d'atomes froids sur un miroir magnétique = Recoil of cold atoms on a magnetic mirrorFEATONBY, P. D; SAVALLI, V; LEE, C et al.Journal de physique. IV. 2000, Vol 10, Num 8, pp Pr8-139, issn 1155-4339, -Pr8-140Conference Paper

Analyse der Hautrauhigkeit bei Personen unterschiedlicher Altersgruppeen mit dem Visiometer: ein neuartiges EDV-gestütztes Messverfahren = Analysis of skin roughness in persons of different age with the visiometer. A new computer-Assisted methodFLUHR, J. W; GEHRING, W; GLOOR, M et al.Aktuelle Dermatologie. 1995, Vol 21, Num 5, pp 151-156, issn 0340-2541Article

Round robin determination of power spectral densities of different Si wafer surfacesMARX, E; MALIK, I. J; STRAUSSER, Y. E et al.SPIE proceedings series. 1998, pp 26-36, isbn 0-8194-2714-4Conference Paper

Field measurement of surface profile of abrasive blast cleaned steel surfaces using a replica tape = Utilisation d'une bande de réplique pour la mesure du profil superficiel d'un acier nettoyé par abrasionMaterials performance. 1987, Vol 26, Num 11, pp 57-60, issn 0094-1492Article

Surface roughness measurement by digital holographyLI YAN; WANG DAYONG; ZHAO JIE et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7656, issn 0277-786X, isbn 978-0-8194-8086-6, 76560X.1-76560X.8, 3Conference Paper

Roughness measurement of metallic surfaces based on the laser speckle contrast methodLEONARD, L. C; TOAL, V.Optics and lasers in engineering. 1998, Vol 30, Num 5, pp 433-440, issn 0143-8166Article

Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directionsKEARNY, M; FURMAN, B. J.SPIE proceedings series. 1998, pp 20-25, isbn 0-8194-2714-4Conference Paper

Nanometer-level metrology with a low-voltage CD-SEMYOSHIMURA, T; EZUMI, M; OTAKA, T et al.SPIE proceedings series. 1998, pp 61-70, isbn 0-8194-2777-2Conference Paper

X-ray scanner for the visualization of the spatial distribution of nanometer scale roughnessPROTOPOPOV, V. V; VALIEV, K. A; IMAMOV, R. M et al.SPIE proceedings series. 1998, pp 65-72, isbn 0-8194-2714-4Conference Paper

Development of a goniometric light scatter instrument with sample imaging abilityZERRAD, Myriam; LEQUIME, Michel; DEUMIE, Carole et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7102, pp 710207.1-710207.15, issn 0277-786X, isbn 978-0-8194-7332-5 0-8194-7332-4, 1VolConference Paper

Photomask edge roughness characterization using an atomic force microscopeFULLER, S; YOUNG, M.SPIE proceedings series. 1998, pp 433-440, isbn 0-8194-2777-2Conference Paper

Statistical process control by employing circular and spherical statistics for the interpretation of BDRF measurementsROTHE, H; HUESER, D; KASPER, A et al.SPIE proceedings series. 1998, pp 47-56, isbn 0-8194-2714-4Conference Paper

Optical Systems Design of Surface Roughness Photoelectric Inspection InstrumentXIAO, Ze-Xin; LI PENG; CAO JIE et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7849, issn 0277-786X, isbn 978-0-8194-8379-9, 78492U.1-78492U.9Conference Paper

Pavement Roughness Measurement Based on Structure LightWANYU LIU; XIAOMING SUN; JIANPING HUANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7133, issn 0277-786X, isbn 978-0-8194-7367-7 0-8194-7367-7, 71332X.1-71332X.6, 2Conference Paper

Study on Computer controlled polishing machine with small air bag toolWANG YI; NI YING; YU, Jing-Chi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6722, pp 67224O.1-67224O.7, issn 0277-786X, isbn 978-0-8194-6879-6 0-8194-6879-7, 2Conference Paper

Size effects on stylus tip reconstruction for micro and nano roughness measurementCHEN, Chao-Chang A; CHEN, Jr-Rung; LIOU, Huay-Chung et al.SPIE proceedings series. 2005, pp 58790H.1-58790H.8, isbn 0-8194-5884-8, 1VolConference Paper

Scattering and surface roughness II (San Diego CA, 21-23 July 1998)Zu-Han Gu; Maradudin, Alexei A.SPIE proceedings series. 1998, isbn 0-8194-2881-7, VII, 382 p, isbn 0-8194-2881-7Conference Proceedings