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Computational analysis of horizontal cold wall CVD reactors at low pressure : Application to tungsten deposition from pyrolysis of W(CO)6XENIDOU, T. C; KOUKOU, M. K; BOUDOUVIS, A. G et al.Journal de physique. IV. 2001, Vol 83, pp Pr3.183-Pr3.188, issn 1155-4339Conference Paper
