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Highly conductive boron-doped nanocrystalline silicon-carbide film prepared by low-hydrogen-dilution photo-CVD method using ethylene as a carbon sourceSEUNG YEOP MYONG; HYUNG KEW LEE; YOON, Euisik et al.Journal of non-crystalline solids. 2002, Vol 298, Num 2-3, pp 131-136, issn 0022-3093Article
