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Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detectionVILLANUEVA, G; MONTSERRAT, J; PEREZ-MURANO, F et al.Microelectronic engineering. 2004, Vol 73-74, pp 480-486, issn 0167-9317, 7 p.Conference Paper
