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Interconnect capacitance characterization using charge-injection-induced error-free (CIEF) charge-based capacitance measurement (CBCM)CHANG, Yao-Wen; CHANG, Hsin-Wen; LU, Tao-Cheng et al.IEEE transactions on semiconductor manufacturing. 2006, Vol 19, Num 1, pp 50-56, issn 0894-6507, 7 p.Conference Paper
