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Preparation of SiNx gate-insulating films for bottom-gate type TFTs by Cat-CVD methodSERI, Yasuhiro; MASUDA, Atsushi; MATSUMURA, Hideki et al.Thin solid films. 2006, Vol 501, Num 1-2, pp 307-309, issn 0040-6090, 3 p.Conference Paper
