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Characterization and attenuation mechanism of CMOS-compatible micromachined edge-suspended coplanar waveguides on low-resistivity silicon substrateLEUNG, Lydia L. W; HON, Wai-Cheong; JINWEN ZHANG et al.IEEE transactions on advanced packaging. 2006, Vol 29, Num 3, pp 496-503, issn 1521-3323, 8 p.Article
