18224669
Results 1 to 1 of 1
Selection :
Formation of Ti and TiN ultra-thin films on Si by ion beam sputter depositionSTYERVOYEDOV, A; FARENIK, V.Surface science. 2006, Vol 600, Num 18, pp 3766-3769, issn 0039-6028, 4 p.Conference Paper
