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Integrating ENSEMBLE™ PMD low-k at the PMD level of CMOS logic circuitsDEMUYNCK, S; DE MARNEFFE, J. F; MILLS, L et al.Microelectronic engineering. 2006, Vol 83, Num 11-12, pp 2303-2308, issn 0167-9317, 6 p.Conference Paper
