18364272
Results 1 to 1 of 1
Selection :
Three-dimensional self-assembled sensors in thin-film SOI technologyIKER, Francois; ANDRE, Nicolas; PARDOEN, Thomas et al.Journal of microelectromechanical systems. 2006, Vol 15, Num 6, pp 1687-1697, issn 1057-7157, 11 p.Article