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MgO sacrificial layer for micromachining uncooled Y-Ba-Cu-O IR microbolometers on Si3N4 bridgesGRAY, J. E; CELIK-BUTLER, Z; BUTLER, D. P et al.Journal of microelectromechanical systems. 1999, Vol 8, Num 2, pp 192-199, issn 1057-7157Article
