18807448
Results 1 to 1 of 1
Selection :
Electrical detection of multiple resonant modes in a CMOS-MEMS cantileverURANGA, A; VERD, J; TORRES, F et al.Microelectronic engineering. 2007, Vol 84, Num 5-8, pp 1374-1378, issn 0167-9317, 5 p.Conference Paper