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Hydrogen desorption and diffusion in PECVD silicon nitride. Application to passivation of CMOS active pixel sensorsBENOIT, D; REGOLINI, J; MORIN, P et al.Microelectronic engineering. 2007, Vol 84, Num 9-10, pp 2169-2172, issn 0167-9317, 4 p.Conference Paper
