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Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiCVANMIL, B. L; LEW, K. K; MYERS-WARD, R. L et al.Journal of electronic materials. 2008, Vol 37, Num 5, pp 685-690, issn 0361-5235, 6 p.Article
