21550404
Results 1 to 1 of 1
Selection :
The structure of Si―SiO2 layers with high excess Si content prepared by magnetron sputteringBARAN, N; BULAKH, B; VENGER, Ye et al.Thin solid films. 2009, Vol 517, Num 18, pp 5468-5473, issn 0040-6090, 6 p.Article