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Characterization of Mg Diffusion into HfO2/SiO2/Si(100) Stacked Structures and Its Impact on Detect State Densities : Fundamentals and Applications of Advanced Semiconductor DevicesOHTA, Akio; KANME, Daisuke; MURAKAMI, Hideki et al.IEICE transactions on electronics. 2011, Vol 94, Num 5, pp 717-723, issn 0916-8524, 7 p.Article
