26067236
Results 1 to 1 of 1
Selection :
First observation on the feasibility of scratch formation by pad―particle mixture in CMP processSUNG, In-Ha; HONG JIN KIM; CHANG DONG YEO et al.Applied surface science. 2012, Vol 258, Num 20, pp 8298-8306, issn 0169-4332, 9 p.Article