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A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing ElectrodesTSAI, Ming-Han; LIU, Yu-Chia; WEILEUN FANG et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 6, pp 1329-1337, issn 1057-7157, 9 p.Article
