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CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording―Characterization and ApplicationSEIDL, Karsten; SCHWAERZLE, Michael; ULBERT, Istvan et al.Journal of microelectromechanical systems. 2012, Vol 21, Num 6, pp 1426-1435, issn 1057-7157, 10 p.Article
