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Epitaxial Germanium on SOI Substrate and Its Application of Fabricating High ION/IOFF Ratio Ge FinFETsCHUNG, Cheng-Ting; CHEN, Che-Wei; LIN, Jyun-Chih et al.I.E.E.E. transactions on electron devices. 2013, Vol 60, Num 6, pp 1878-1883, issn 0018-9383, 6 p.Article