27816033
Results 1 to 1 of 1
Selection :
Temperature-Compensated CMOS-MEMS Oxide ResonatorsLIU, Yu-Chia; TSAI, Ming-Han; CHEN, Wen-Chien et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1054-1065, issn 1057-7157, 12 p.Article