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• 001 Exact sciences and technology.
  • 001B Physics
    • 001B50 Physics of gases, plasmas and electric discharges.
      • 001B50B Physics of plasmas and electric discharges.
        • 001B50B77 Plasma applications.
          • 001B50B77D Plasma-based ion implantation and deposition.

Title

• fr : Implantation ionique et dépôt par plasma.
• en : Plasma-based ion implantation and deposition.

SKOS Notation

001B50B77D

In the plan

Pascal Classification Scheme