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• 001 Exact sciences and technology.
  • 001B Physics
    • 001B60 Condensed matter: structure, mechanical and thermal properties. (See also 002A03G, 001D10, 001D09, 001D08B, 001B80A40, 001B30F40)
      • 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties). (See also 001C01I, 001B80A30, 001B60F, 001B60A72, 001B60A)
        • 001B60H55 Thin film structure and morphology.
          • 001B60H55J Structure and morphology; thickness.
          • 001B60H55L Defects and impurities: doping, implantation, distribution, concentration, etc..
          • 001B60H55N Composition and phase identification.

Title

• fr : Structure et morphologie de couches minces.
• en : Thin film structure and morphology.

Scope note

• Méthodes de dépôt de couches minces, de croissance de films et d'épitaxie, voir: 001B80A15.
• Methods of thin film deposition, film growth and epitaxy, see: 001B80A15.

SKOS Notation

001B60H55

In the plan

Pascal Classification Scheme