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• 001 Exact sciences and technology.
  • 001B Physics
    • 001B80 Cross-disciplinary physics: materials science; rheology. (See also 001D10, 001D09, 001D08B)
      • 001B80A Materials science. (See also 001B60D, 001B60B)
        • 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy.
          • 001B80A15C Deposition by sputtering.

Title

• en : Deposition by sputtering.
• fr : Depôt par pulvérisation cathodique.

SKOS Notation

001B80A15C

In the plan

Pascal Classification Scheme