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• 001 Exact sciences and technology.
  • 001B Physics
    • 001B80 Cross-disciplinary physics: materials science; rheology. (See also 001D10, 001D09, 001D08B)
      • 001B80A Materials science. (See also 001B60D, 001B60B)
        • 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy.
          • 001B80A15G Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.).

Title

• en : Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.).
• fr : Dépôt chimique en phase vapeur (incluant le CVD activé par plasma, MOCVD, etc.).

SKOS Notation

001B80A15G

In the plan

Pascal Classification Scheme