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• 001 Exact sciences and technology.
  • 001B Physics
    • 001B80 Cross-disciplinary physics: materials science; rheology. (See also 001D10, 001D09, 001D08B)
      • 001B80A Materials science. (See also 001B60D, 001B60B)
        • 001B80A16 Methods of nanofabrication. (See also 001B60A46)
          • 001B80A16N Nanolithography.

Title

• fr : Nanolithographie.
• en : Nanolithography.

SKOS Notation

001B80A16N

In the plan

Pascal Classification Scheme