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001D03F21 Micro- and nanoelectromechanical devices (MEMS/NEMS).
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001
Exact sciences and technology.
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001D
Applied sciences.
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001D03
Electronics. (See also 001D06D03, 001D06C02)
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001D03F
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices.
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001D03F21
Micro- and nanoelectromechanical devices (MEMS/NEMS).
Title
- fr : Dispositifs micro- et nanoélectromécaniques (MEMS/NEMS).
- en : Micro- and nanoelectromechanical devices (MEMS/NEMS).
SKOS Notation
001D03F21
In the plan
Pascal Classification Scheme
