Production of novel 3D microstructures using excimer laser mask projection techniques
- Author
- RIZVI, N. H1
[1] Exitech Limited, Hanborough Park, Long Hanborough, Oxford OX8 8LH, United Kingdom - Conference title
- Design, test, and microfabrication of MEMS and MOEMS (Paris, 30 March - 1 April 1999)
- Conference name
- Design, test, and microfabrication of MEMS and MOEMS. Conference (Paris 1999-03-30)
- Author (monograph)
- Courtois, Bernard (Editor); Crary, Selden B (Editor); Ehrfeld, Wolfgang (Editor); Fujita, Hiroyuki (Editor); Karam, Jean Michel (Editor); Markus, Karen (Editor)
CNRS, Techniques de l'informatique et de la microélectronique pour l'architecture d'ordinateurs, Grenoble, France (Organiser of meeting)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting) - Source
SPIE proceedings series. 1999 ; 2Vol, pp 546-552
- ISBN
- 0-8194-3154-0
- Scientific domain
- Electronics; Mechanical engineering; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Ablation Excimère Microstructure Microusinage Usinage laser
- Keyword (en)
- Ablation Excimer Microstructure Micromachining Laser beam machining
- Keyword (es)
- Ablación Excímero Microestructura Micromaquinado Mecanizado láser
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1171382
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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