Fast approach to kinetic simulations of RF discharge in plasma reactors
- Autor
- SCHWEIGERT, V. A1 ; ALEXANDROV, A. L1 ; GIMELSHTEIN, S. F1 ; IVANOV, M. S1
[1] Institute of Theoretical and Applied Mechanics, 630090, Novosibirsk, Russian Federation - Fuente
Plasma sources science & technology (Print). 2000, Vol 9, Num 1, pp B1-B3 ; ref : 6 ref
- ISSN
- 0963-0252
- Campo Científico
- Plasma physics
- Editor
- Institute of Physics, Bristol
- País de la publicación
- United Kingdom
- Tipo de documento
- Article
- Idioma
- Russian
- Palabra clave (fr)
- Collision particule Décharge Etude théorique Méthode Monte Carlo Méthode particule dans cellule Radiofréquence Réacteur plasma Simulation plasma
- Palabra clave (in)
- Particle collision Discharge Theoretical study Monte Carlo methods Particle in cell method Radiofrequency Plasma reactor Plasma simulation
- Palabra clave (es)
- Colisión partícula Descarga Método partícula dentro célula Radiofrecuencia Reactor plasma
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B20 Elementary processes in plasma / 001B50B20H Atomic, molecular, ion, and heavy-particle collisions
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B25 Plasma properties / 001B50B25D Plasma kinetic equations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B65 Plasma simulation
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges
- Disciplina
- Physics of gases, plasmas and electric discharges
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 1255074
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0963-0252/9/1/401 
https://dx.doi.org/10.1088/0963-0252/9/1/401
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