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CBE and MOCVD growth of GaInNAs

Author
MIYAMOTO, T1 ; KAGEYAMA, T2 ; MAKINO, S2 ; SCHLENKER, D2 ; KOYAMA, F2 ; IGA, K2
[1] Research Center for Quantum Effect Electronics, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
[2] Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan
Conference title
Chemical Beam Epitaxy and Related Growth Techniques 1999: Proceedings of the Seventh International Conference on Chemical Beam Epitaxy and Related Growth Techniques, Tsukuba, Japan, July 28-30, 1999
Conference name
ICCBE International Conference on Chemical Beam Epitaxy and Related Growth Techniques (7 ; Tsukuba 1999-07-28)
Author (monograph)
SUGIURA, H (Editor)1 ; KONAGAI, M (Editor)2 ; ASAHI, H (Editor)3
[1] NTT Photonics Laboratories, Japan
[2] Tokyo Institute of Technology, Japan
[3] Osaka University, Japan
Source

Journal of crystal growth. 2000, Vol 209, Num 2-3, pp 339-344 ; ref : 18 ref

CODEN
JCRGAE
ISSN
0022-0248
Scientific domain
Crystallography; Geology; Metallurgy, welding
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Conference Paper
Language
English
Keyword (fr)
Azote Composé quaternaire Contamination Croissance cristalline en phase vapeur Décomposition thermique Dépôt chimique phase vapeur Epitaxie jet chimique Etude comparative Etude expérimentale Gallium arséniure Gallium nitrure Hydrazine organique Indium arséniure Indium nitrure Multicouche Méthode MOCVD Photoluminescence Précurseur Puits quantique Radical libre minéral Semiconducteur III-V As Ga In N GaInNAs Hydrazine(diméthyl) Composé minéral
Keyword (en)
Nitrogen Quaternary compounds Contamination Crystal growth from vapors Thermal decomposition CVD Chemical beam epitaxy Comparative study Experimental study Gallium arsenides Gallium nitrides Organic hydrazine Indium arsenides Indium nitrides Multilayers MOCVD Photoluminescence Precursor Quantum wells Inorganic free radical III-V semiconductors Inorganic compounds
Keyword (es)
Descomposición térmica Estudio comparativo Hidracina orgánica Radical libre inorgánico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15H Molecular, atomic, ion, and chemical beam epitaxy

Pacs
8115G Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)

Pacs
8115H Molecular, atomic, ion, and chemical beam epitaxy

Discipline
Physics and materials science
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1288662

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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