Structural transitions in hard Si-based TiN coatings: the effect of bias voltage and temperature
- Author
- VAZ, F1 ; REBOUTA, L1 ; GOUDEAU, Ph2 ; GIRARDEAU, T2 ; PACAUD, J2 ; RIVIERE, J. P2 ; TRAVERSE, A3
[1] Departmento Física, Universidade do Minho, Campus de Azurém, 4800-058 Guimarães, Portugal
[2] Laboratoire de Métallurgie Physique, Université de Poitiers, 86960 Futuroscope, France
[3] LURE, Université de Paris Sud, 91405 Orsay, France - Conference title
- Proceedings of the 28th International Conference on Metallurgical Coatings and Thin Films, San Diego, California, April 30 - May 4, 2001
- Conference name
- International Conference on Metallurgical Coatings and Thin Films (28 ; San Diego, CA 2001-04-30)
- Author (monograph)
- MITTERER, C (Editor)1 ; PIQUE, A (Editor); MARCHEV, K (Editor); SCHNEIDER, J. M (Editor); VOEVODIN, A. A (Editor)2
[1] Department of Physical Metallurgy and Materials Testing, University of Leoben, Franz-Josef-Strasse 18, 8700 Leoben, Austria
[2] Air Force Research Laboratory, Materials Directorate, Wright-Patterson AFB, Wright-Patterson, OH 45433-7746, United States - Source
Surface & coatings technology. 2001, Vol 146-47, pp 274-279 ; ref : 23 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Composé ternaire Couche mince Diffraction RX Dépôt physique phase vapeur EXAFS Etude expérimentale Magnétron Microscopie électronique balayage Microstructure Paramètre cristallin Potentiel polarisation Revêtement Silicium nitrure Structure cristalline Texture Titane nitrure Transformation phase
- Keyword (en)
- Ternary compounds Thin films XRD Physical vapor deposition EXAFS Experimental study Magnetrons Scanning electron microscopy Microstructure Lattice parameters Polarization potential Coatings Silicon nitrides Crystal structure Texture Titanium nitrides Phase transformations
- Keyword (es)
- Potencial polarización
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13379109
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0257-8972(01)01395-0 
https://dx.doi.org/10.1016/S0257-8972(01)01395-0
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