Factors affecting compressive stress produced in titanium nitride films deposited by reactive HCD ion plating
- Author
- MIURA, Kenichi1 ; ISHIGAMI, Itsuo1
[1] Technology Research Institute of Osaka Prefecture, Izumi 594-1157, Japan - Source
Nippon Kinzoku Gakkaishi (1952). = Journal of the Japan Institute of Metals (1952). 2001, Vol 65, Num 11, pp 981-986 ; ref : 19 ref
- CODEN
- NIKGAV
- ISSN
- 0021-4876
- Scientific domain
- Metallurgy, welding
- Publisher
- Nippon Kinzoku Gakkai, Sendai
- Publication country
- Japan
- Document type
- Article
- Language
- Japanese
- Keyword (fr)
- Analyse contrainte Cathode creuse Contrainte compression Contrainte résiduelle Couche mince Etude expérimentale Grosseur grain Microscopie électronique balayage Placage ionique Titane nitrure
- Keyword (en)
- Stress analysis Hollow cathodes Compressive stress Residual stresses Thin films Experimental study Grain size Scanning electron microscopy Ion plating Titanium nitrides
- Keyword (es)
- Tensión compresión
- Keyword (de)
- Druckspannung
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Discipline
- Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13397393
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.2320/jinstmet1952.65.11_981 
https://dx.doi.org/10.2320/jinstmet1952.65.11_981
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