Data mining for improving a cleaning process in the semiconductor industry
- Author
- BRAHA, Dan1 ; SHMILOVICI, Armin2
[1] Center for Innovation in Product Development, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
[2] Department of Industrial Engineering and Management, Ben-Gurion University, Beer-Sheva 84105, Israel - Source
IEEE transactions on semiconductor manufacturing. 2002, Vol 15, Num 1, pp 91-101 ; ref : 26 ref
- ISSN
- 0894-6507
- Scientific domain
- Electronics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Arbre décision Circuit intégré Epuration voie sèche Essai Fabrication microélectronique Faisceau laser Fouille donnée Nettoyage Réseau neuronal
- Keyword (en)
- Decision tree Integrated circuit Dry cleaning Test Microelectronic fabrication Laser beam Data mining Cleaning Neural network
- Keyword (es)
- Arbol decisión Circuito integrado Depuración vía seca Ensayo Fabricación microeléctrica Haz láser Busca dato Limpieza Red neuronal
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 13473480
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/66.983448 
https://dx.doi.org/10.1109/66.983448
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